Title:
歪みゲルマニウム膜を含むデバイス
Document Type and Number:
Japanese Patent JP6664892
Kind Code:
B2
Abstract:
Optical and/or electronic device comprising a suspended, germanium-based membrane (20) and comprising an active zone (21) placed under tension by tensioning arms (23), said device being characterized in that it comprises at least one tensioning arm (23) comprising nonparallel lateral sides (32), the width of which increases with distance from the active zone (21).
Inventors:
Kevin Guyoi
Nikola pork
Vincent Calvo
Vincent Revo
Nikola pork
Vincent Calvo
Vincent Revo
Application Number:
JP2015124423A
Publication Date:
March 13, 2020
Filing Date:
June 22, 2015
Export Citation:
Assignee:
Commissaria Allenergy Atomique Eo Energy's Alternatives
International Classes:
H01S5/183; H01L21/20; H01L31/02
Domestic Patent References:
| JP8094398A |
Foreign References:
| GB2501307A | ||||
| WO2014018940A1 | ||||
| US20140079085 |
Other References:
SUKHDEO et al.,“Mimicking Heterostructure Behavior Within a Single Material at Room Temperature Using Strain”,Optical Society of America,2014年,CLEO: Science and Innovations,SM1H.2
NAM et al.,“Simulation for Efficient Germanium VCSEL for Optical Interconnects”,2012 Optical Interconnects Conference,2012年 5月,p.58-59
SHAH et al.,“Tensile strained Ge membranes”,2014 15th International Conference on Ultimate Integration on Silicon (ULIS),2014年 4月,p.137-140
NAM et al.,“Simulation for Efficient Germanium VCSEL for Optical Interconnects”,2012 Optical Interconnects Conference,2012年 5月,p.58-59
SHAH et al.,“Tensile strained Ge membranes”,2014 15th International Conference on Ultimate Integration on Silicon (ULIS),2014年 4月,p.137-140
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Hidekazu Matsumaru
Kenichi Imamura
Sekiya Mitsuo
Toshiaki Watanabe
Hidekazu Matsumaru
Kenichi Imamura