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Patent Searching and Data


Title:
DIAMOND POROUS BODY AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH04160074
Kind Code:
A
Abstract:

PURPOSE: To obtain a diamond porous body useful as a chemical and heat resistant filter, a heat conductor, etc., by forming open pores between matrixes each made practically of diamond.

CONSTITUTION: A mixed layer consisting of grown diamond crystals and a non-diamond carbonaceous material is formed on a substrate such as an Si wafer. The diamond crystals have been oriented so as to make specified crystal faces parallel to the surface of the substrate. When chemical vapor growth is carried out with a gaseous methane-hydrogen mixture, the concn. of methane is regulated to 1.5-6%, preferably 3-6% and a mixed layer consisting of diamond columnar crystals oriented with the (100) faces and a non-diamond carbonaceous material is formed. The non-diamond carbonaceous material is then selectively removed by plasma etching to form pores, diamond is isostatically grown and the resulting diamond crystals are crosslinked to obtain a porous diamond body.


Inventors:
ARAI SHINJI
KAMATA MASATO
Application Number:
JP28177390A
Publication Date:
June 03, 1992
Filing Date:
October 22, 1990
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
C04B38/00; C01B31/06; C30B29/04; (IPC1-7): C01B31/06; C04B38/00; C30B29/04
Attorney, Agent or Firm:
Takehiko Suzue (3 outside)