Title:
DIELECTRIC THIN FILM ELEMENT AND ELECTRONIC CIRCUIT DEVICE
Document Type and Number:
Japanese Patent JP2022049235
Kind Code:
A
Abstract:
To provide a dielectric thin film element with high breakdown voltage.SOLUTION: A dielectric thin film element has a first electrode layer, a dielectric layer, and a second electrode layer, in order from a substrate side. The first electrode layer satisfies 0.75≤Rsk1≤5.0, where Rsk1 is the skewness of the roughness curve on the dielectric layer side of the first electrode layer.SELECTED DRAWING: Figure 3
Inventors:
HARADA YOSHINORI
ISHII DAIKI
YANO YOSHIHIKO
ISHII DAIKI
YANO YOSHIHIKO
Application Number:
JP2020155341A
Publication Date:
March 29, 2022
Filing Date:
September 16, 2020
Export Citation:
Assignee:
TDK CORP
International Classes:
H01G4/33; H01G4/30
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation