Title:
DIFFERENTIAL-PRESSURE MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPH05164642
Kind Code:
A
Abstract:
PURPOSE:To obtain high reliability, which does not cause the short circuits and the like of leads, by providing a magnet, which attracts magnetic dust, in the path of sealing liquid provided in a cover, and removing the dust. CONSTITUTION:Pressure acting from the high pressure side is transferred to a silicon diaphragm 8 with sealing liquid 101, and pressure from the low-pressure side is transferred to the silicon diaphragm 8 with sealing liquid 102. Therefore, the diaphragm 8 is distorted in response to the pressure difference between the high pressure side and the low pressure side. The amount of distortion is taken out electrically with a strain gage 80, and the pressure difference is measured. At this time, out of a large amount of magnetic dust, which is present in a housing part 1, some of the dust is going enter into a sensor part together with the sealing liquids 101 and 102, but the dust is attached to a magnet 24 provided in a path 23 of a cover 21 and does not reach the sensor part. As a result, the conductive dust does not come into contact with an electric lead 81 of the sensor, and the operation stop of the sensor caused by the short circuits of the sensor and the decrease in resistance is eliminated.
Inventors:
KUWAYAMA HIDEKI
Application Number:
JP33216191A
Publication Date:
June 29, 1993
Filing Date:
December 16, 1991
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01L13/02; G01L9/00; (IPC1-7): G01L13/02
Attorney, Agent or Firm:
Shinsuke Ozawa