Title:
DIFFERENTIAL PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH05256718
Kind Code:
A
Abstract:
PURPOSE:To realize a compact and light-weight sensor by forming a first and a second diaphragm parts in a silicon layer and providing at least one of the diaphragm parts with a pressure sensitive element. CONSTITUTION:A first and a second diaphragm parts 24, 25 are formed in a silicon layer 1 held between a first and a second structural layers 22 and 23 made of Pyrex glass. Moreover, pressure sensitive elements (e.g. strain gauges) 32, 33 are formed at the respective diaphragm parts 24, 25. A first room 26 and a first prime room 28 are defined in the spaces between the diaphragm part 24 and the structural layers 22, 23. Similarly, a second room 27 and a second prime room 29 are formed in the spaces between the diaphragm part 25 and the structural layers 22, 23. The pressure via a first and a second pressure introducing holes 30, 31 through which the pressure is introduced into the rooms 28, 29 works to each surface of the diaphragm parts 24, 25, and consequently the elements 32, 33 generate signals corresponding to the differential pressure. If the excessive pressure acts to the pressure introducing hole 30 or 31, the diaphragm part 24 or 25 is pressed in touch with the structural layer 22, thereby to prohibit the further increase of the pressure in the rooms 26, 27.
Inventors:
Satoshi Fukuhara
Kyoichi Ikeda
Tetsuya Watanabe
Kyoichi Ikeda
Tetsuya Watanabe
Application Number:
JP5552192A
Publication Date:
October 05, 1993
Filing Date:
March 13, 1992
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01L13/00; G01L9/00; G01L19/00; (IPC1-7): G01L13/00; G01L19/00
Attorney, Agent or Firm:
Shinsuke Ozawa