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Title:
DISCHARGE EXCITATION EXCIMER LASER DEVICE
Document Type and Number:
Japanese Patent JPH04211184
Kind Code:
A
Abstract:

PURPOSE: To increase the standby ionization electron density so as to increase the output of a laser beam by forming a dielectric to a cylindrical shape and a section facing a main discharge electrode to a plate-like shape and facing an auxiliary electrode to the main discharge electrode.

CONSTITUTION: An anode 1 and a cathode 2 are faced to each other. The cathode 2 is formed in a grating- or comb-like shape. The anode 1 is faced to the cathode 2 and a dielectric 3 is arranged on the outside of the cathode 2. The dielectric 3 is provided with a plate-like section having a surface polished to a mirror surface in the direction facing the cathode 2 and formed to an angular pipe. An auxiliary electrode 4 is contained in the dielectric 3 with a space C. When the surface of the plate-like section is polished to a mirror surface, the auxiliary electrode 4 can be closely stuck to the plate-like section. Therefore, the insulating performance can be improved and, in addition, the auxiliary electrode housing process can also be simplified.


Inventors:
WATABE SHUNTARO
OEDA YASUO
OKO TAKESHI
UEHARA YOSHITO
TERADA MITSUGI
SHIBATA EISHO
TERASHI YUICHIRO
Application Number:
JP3849591A
Publication Date:
August 03, 1992
Filing Date:
March 05, 1991
Export Citation:
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Assignee:
MITSUI PETROCHEMICAL IND
International Classes:
H01S3/038; (IPC1-7): H01S3/038
Attorney, Agent or Firm:
Tsutomu Toyama (2 outside)



 
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