Title:
DISCHARGE EXCITATION TYPE LASER DEVICE
Document Type and Number:
Japanese Patent JPH05251792
Kind Code:
A
Abstract:
PURPOSE: To prevent the deterioration of the laser optical part of a discharge excitation type laser device.
CONSTITUTION: Gas introducing paths 20 for blowing off a laser gas 1 toward the direction of an excitation space in a chamber 5 are formed to flanges 18 for introducing the gas for introducing the laser gas 1 to the vicinity of a partial reflecting mirror 2 and a total reflecting mirror 3, and the laser gas 1 is not sprayed directly against the partial reflecting mirror 2 and the total reflecting mirror 3.
Inventors:
SUZUKI AKIHIRO
WAKATA HITOSHI
HARUTA TAKEO
MINAGAWA TADAO
TSUBOI SHUNGO
WAKATA HITOSHI
HARUTA TAKEO
MINAGAWA TADAO
TSUBOI SHUNGO
Application Number:
JP34074892A
Publication Date:
September 28, 1993
Filing Date:
December 21, 1992
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01S3/034; H01S3/036; (IPC1-7): H01S3/034; H01S3/036
Attorney, Agent or Firm:
Soga Doteru (6 people outside)