Title:
DISPLACEMENT DETECTING APPARATUS
Document Type and Number:
Japanese Patent JPH05215515
Kind Code:
A
Abstract:
PURPOSE:To obtain a displacement detecting apparatus, which can measure the displacement data of a moving body highly accurately. CONSTITUTION:Coherent luminous fluxes are emitted from a semiconductor laser 1 on the surface of a body 101. Two luminous fluxes through the body are made to interfere and detected with a detecting means 5. When the displacement data of the body are obtained by using the signals obtained with the detecting means, the semiconductor laser is arranged so that the surface of the body is approximately in parallel with an active-layer surface 2 of the semiconductor laser. Two luminous fluxes are the luminous fluxes, which are emitted in two directions from the active layer surface of the semiconductor laser. Means for directing the two luminous fluxes on the surface of the body are further provided.
Inventors:
YOSHII MINORU
TAKEUCHI SEIJI
NOSE HIROYASU
TAKEUCHI SEIJI
NOSE HIROYASU
Application Number:
JP4626392A
Publication Date:
August 24, 1993
Filing Date:
January 31, 1992
Export Citation:
Assignee:
CANON KK
International Classes:
G01B11/00; G01D5/38; H01L21/027; H01L21/30; (IPC1-7): G01B11/00; H01L21/027
Attorney, Agent or Firm:
Takanashi Yukio