Title:
変位検出方式の力検出構造及び力センサ
Document Type and Number:
Japanese Patent JP7021174
Kind Code:
B2
Abstract:
To provide a displacement detection type force detection structure in which changes of a detection value are prevented when a component is deformed by an environment factor other than a force such as temperature or humidity.SOLUTION: A force detection structure 10 comprises: a first end part 12; a second end part 14; a coupling part 16 for elastically coupling the first end part and the second end part with 3 degrees of freedom; and a detection part 18 for detecting the relative displacement of the first end part and the second end part that accompanies the elastic deformation of the coupling unit 16. The detection part 18 includes a first differential detection part for differentially detecting the relative movement of the first end part 12 and second end part 14 along a first axis as first movement data using signals having mutually opposite phases, a second differential detection part for differentially detecting the relative movement of the first end part 12 and second end part 14 along a second axis as second movement data using signals having mutually opposite phases, and a third differential detection part for differentially detecting the relative movement of the first end part 12 and second end part 14 around a center axis along a third axis as rotation data using signals having mutually opposite phases.SELECTED DRAWING: Figure 1
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Inventors:
Tetsuro Sakano
Shunichi Odaka
Shunichi Odaka
Application Number:
JP2019215459A
Publication Date:
February 16, 2022
Filing Date:
November 28, 2019
Export Citation:
Assignee:
FANUC Corporation
International Classes:
G01L5/164; G01L5/165; G01L5/166; G01L5/169
Domestic Patent References:
| JP2004301731A | ||||
| JP2016070824A | ||||
| JP2011128096A | ||||
| JP2010230631A | ||||
| JP2013040869A | ||||
| JP2012237570A | ||||
| JP2014106174A | ||||
| JP11511244A | ||||
| JP60177232A | ||||
| JP2014115282A |
Foreign References:
| US20150292969 |
Attorney, Agent or Firm:
Aoki Atsushi
Shinji Mihashi
Shigeki Hirose
Shinji Mihashi
Shigeki Hirose
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