Title:
変位デバイスおよび方法とそれに関連付けられた運動を検出し推定するための装置
Document Type and Number:
Japanese Patent JP6373992
Kind Code:
B2
Abstract:
Apparatus and method estimate a position of a movable stage. The apparatus comprises: a stator comprising 2D array of sensors arranged relative to one another to provide a plurality of stator-Y oriented sensor columns and a plurality of stator-X oriented sensor rows; a movable stage comprising a first Y-magnet array comprising a plurality of first magnetization segments generally linearly elongated in a stage-Y direction, each first magnetization segment having a stage-Y direction length, Lyy, and a magnetization direction generally orthogonal to the stage-Y direction, the magnetization directions of the plurality of first magnetization segments exhibiting a first magnetic spatial period λx over a stage-X direction width, Wyx, of the first magnet array; and a controller connected to receive information based on an output from each of the sensors and configured to use the information to determine a stator-X direction position of the movable stage.
Inventors:
Le, Xiao Dong
Application Number:
JP2016532170A
Publication Date:
August 15, 2018
Filing Date:
August 06, 2014
Export Citation:
Assignee:
The University of British Columbia
International Classes:
G01D5/14; G01B7/00; H02K41/03
Domestic Patent References:
| JP2002112526A | ||||
| JP2011517766A | ||||
| JP200447981A |
Foreign References:
| US20110084637 | ||||
| WO2013059934A1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Yuko Hara
Masakazu Ito
Yuko Hara