Title:
DISPLACEMENT MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2022121329
Kind Code:
A
Abstract:
To provide a displacement measuring device designed for use in a vacuum environment.SOLUTION: The displacement measuring device comprises: a scale; and a detection head part for detecting the relative displacement or position to the scale and arranged with a prescribed gap from and facing the scale so as to be displaceable relative thereto. The scale is disposed in a vacuum. The detection head part is accommodated in an accommodation holder that separates between the vacuum environment side and the atmospheric environment side. The accommodation holder has relay means in a gap between the detection head part and the scale, that allows a detection signal between the detection head part and the scale to pass through.SELECTED DRAWING: Figure 1
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Inventors:
YAMAMURO MASATAKA
Application Number:
JP2021018626A
Publication Date:
August 19, 2022
Filing Date:
February 08, 2021
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
G01D5/245
Attorney, Agent or Firm:
Koichiro Yoneda