Title:
磁気ディスクの両面欠陥検査方法及びその装置
Document Type and Number:
Japanese Patent JP5282002
Kind Code:
B2
Abstract:
A device that is capable of simultaneously inspecting both sides of surfaces of a magnetic disk to detect defects thereon includes a front-side defect detecting section and a back-side defect detecting section each of which optically detect a scratch and a defect that are present on the front and back surfaces of the magnetic disk, to improve a throughput for inspection. The back-side defect detecting section has an optical path changing section that reflects a laser beam emitted by a laser light source to change an optical path thereof and thereby to direct the laser beam toward the back surface of the magnetic disk and that reflects scattered light that has been collected by a Fresnel lens to change an optical path thereof and thereby to direct the scattered light toward a first photoelectric converter.
Inventors:
Atsushi Victory
Application Number:
JP2009227196A
Publication Date:
September 04, 2013
Filing Date:
September 30, 2009
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G11B5/84; G01B11/30; G01N21/95
Domestic Patent References:
| JP2008268189A | ||||
| JP2006220656A | ||||
| JP5273137A | ||||
| JP4062457A | ||||
| JP56121150U |
Foreign References:
| WO2008136111A1 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation