Title:
DRESSING DEVICE AND POLISHING DEVICE PROVIDED WITH THIS DRESSING DEVICE
Document Type and Number:
Japanese Patent JP3772946
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dressing device capable of enhancing flatness of a polished surface of a turn table by giving a dressing to the surface while controlling the attitude of a dresser main body by electromagnetic force and provide a polishing device provided with the dressing device.
SOLUTION: This dressing device 5, giving a dressing to a polished surface on a turn table 1 coming into slide contact with a polishing object, are provided with a dresser main unit 9 making contact with the polished surface to give a dressing to the surface, a press means 22 pressing the dresser main unit 9 to the polished surface of the turn table 1, and an attitude control means 11 controlling the attitude of the dresser main unit 9 by electromagnetic force.
Inventors:
Kazuki Sato
Norio Kimura
Norio Kimura
Application Number:
JP6571099A
Publication Date:
May 10, 2006
Filing Date:
March 11, 1999
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B21/00; B24B21/18; B24B31/00; B24B53/017; H01L21/304; (IPC1-7): B24B37/00; B24B21/00; H01L21/304
Domestic Patent References:
| JP10180613A |
Foreign References:
| WO1999002305A1 |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Susumu Ohata
Shintaro Hotta
Susumu Ohata
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