Title:
DRIVE DEVICE OF CONVEYOR BELT
Document Type and Number:
Japanese Patent JPS60118511
Kind Code:
A
Abstract:
PURPOSE: To simplify the construction by constituting a drive belt wound on guide rollers of a conveyor belt so as to drive the drive belt guide rollers in the wafer conveyor belt of a semiconductor element production device.
CONSTITUTION: A drive belt 7 wound on rollers 2a, 2a located at both ends is wound on guide rollers 8, 9 and is driven via a drive motor 10 and the guide roller 9, and it drives a conveyor belt 3 via the rotation of the rollers 2a. Furthermore, distances between rollers 2-2, 2a-2a are changed by an air cylinder via a belt 6. Accordingly, no sag, etc. is generated on the belt even if the distance between frames 1-1 is changed, thus the drive can be performed with one motor.
Inventors:
IWATA YOSHIKI
KAWASE NOBUO
TANAKA KEITOKU
MIYAKE TAKASHI
KAWAURA HIROSHI
KAWASE NOBUO
TANAKA KEITOKU
MIYAKE TAKASHI
KAWAURA HIROSHI
Application Number:
JP22624183A
Publication Date:
June 26, 1985
Filing Date:
November 30, 1983
Export Citation:
Assignee:
CANON HANBAI KK
CANON KK
CANON KK
International Classes:
B65G23/00; B65G23/24; H01L21/67; H01L21/677; (IPC1-7): B65G23/00; H01L21/68
Attorney, Agent or Firm:
Marushima Giichi