To provide a droplet discharge head which are excellent in a nozzle machinability, in a discharge stability, and also in rubbing resistance (wear resistance), and also to provide a manufacturing method therefor and a droplet discharge apparatus with the head.
Provided are a droplet discharge head with a water repellent film on its nozzle surface, and its manufacturing method. A protective plate 34, a nozzle plate 36, a pool plate 38, communicating hole plates 40 and 42, a pressure chamber plate 44, and an oscillating plate 46 are aligned and stacked, and bonded by heat sealing or with an adhesive. A ta-C (tetra-hedral amorphous carbon) film 48 and a water repellent film 49 are then formed on the nozzle plate 36 via the protective plate 34. The rubbing resistance (wear resistance) is thereby improved as wells as the nozzle machinability and the discharge stability.
COPYRIGHT: (C)2008,JPO&INPIT
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KATAOKA MASAKI
MURAKAMI HIRONORI
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda