Title:
カソード材料の連続的な堆積のためのデュアルアノード交流電源
Document Type and Number:
Japanese Patent JP4712046
Kind Code:
B2
Abstract:
There is provided by this invention an apparatus for sputter deposition of an insulating material in a continuous mode of operation that utilizes at least two sputtering anodes and a cathode connected to a center tapped conductor to maintain the target cathode at a negative potential with respect to the plasma wherein an ac power supply drives each anode alternately to an ion collecting state to attract ions in the half cycle that a sputtering anode is at a negative potential relative to the plasma, and an electron collecting state to attract electrons in the half cycle that a sputtering anode is at a small potential relative to the plasma or is near the plasma potential. In an alternate embodiment the center tapped conductor is replaced with a pair of series connected diodes having the cathode of a first diode connected to a first sputtering anode, a cathode of a second diode connected to a second sputtering anode and the junction of the anodes of the first and second diodes connected to the target cathode to maintain the target cathode at a negative potential with respect to said plasma wherein the ac power supply drives each sputtering anode alternately to an ion collecting state to attract ions in the half cycle that an anode is at a negative potential relative to the plasma, and an electron collecting state to attract electrons in the half cycle that an anode is at a potential relative to the plasma small compared to the power supply voltage and providing for plasma current flow during the period either sputtering anode is in an ion collecting state.
Inventors:
Seymour, Eric
Shawl, Richard A.
Shawl, Richard A.
Application Number:
JP2007546891A
Publication Date:
June 29, 2011
Filing Date:
December 15, 2005
Export Citation:
Assignee:
Advanced Energy Industries, Inc.
International Classes:
C23C14/34
Domestic Patent References:
| JP2002501577A |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita