To enhance the reliability at a low cost without any thermally adverse effect on peripheral equipment in an ion deposition system electrifier.

The electrifier is provided with an ion generator 1. The ion generator 1 is provided with an ion generating part 6 consisting of a dielectric electrode disposed on one surface of a ceramic substrate and an ion generating electrode disposed with an insulating layer. On the other surface of the ceramic substrate, heater electrodes 7A and 7B are arranged. The ion generator 1 is positioned in the recessed part 21 of a holding member 20 and further, pressed/ held on the side of the holding member 20 by a fixing member 30. The holding member 20 and the fixing member 30 are made of metal having high thermal conductivity and a heat radiating opening 23 is provided in the holding member 20.