Title:
電子ビーム描画方法
Document Type and Number:
Japanese Patent JP4612013
Kind Code:
B2
Inventors:
Hiroto Yasuse
Takehiko Katsuma
Jewel beetle Shuichi
Takashi Kamikubo
Nishimura Rieko
Makoto Hiramoto
Tomoo Motosugi
Takayuki Onishi
Takehiko Katsuma
Jewel beetle Shuichi
Takashi Kamikubo
Nishimura Rieko
Makoto Hiramoto
Tomoo Motosugi
Takayuki Onishi
Application Number:
JP2007104197A
Publication Date:
January 12, 2011
Filing Date:
April 11, 2007
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
G03F7/039; G03F7/004; G03F7/038; H01L21/027
Domestic Patent References:
| JP9160244A | ||||
| JP2004070055A | ||||
| JP2001274076A | ||||
| JP2006091677A | ||||
| JP5166707A | ||||
| JP4363014A | ||||
| JP11219879A | ||||
| JP2000012419A |
Attorney, Agent or Firm:
Mitsuyuki Matsuyama
Tetsuma Ikegami
Tetsuma Ikegami