PURPOSE: To facilitate alignment of an electron emitting element with modulation electrodes and accomplish a high grade image at low cost by laminating the modulation electrodes an insulation layer, and the electron emitting element one over another on an insulated base board, taking away part of the insulation layer, and exposing the modulation electrodes.
CONSTITUTION: From an electroconductive material a group of linearly shaped modulation electrodes 32 are formed on a glass base board 31 by means of evaporation and photo-lithographic technique. Then an insulation layer 33 is attached by evaporation process with SiO2, and further an element electrode 35 and an element wiring electrode 34 are fabricated from Ni material through evaporation and etching technique. A super-particulate film of Pd is provided between electrodes mating with each other by the gas deposition process, and thus an electron emission part 35 is formed. A layer 33 in the neighborhood of the element electrode 35 is removed rectangularly by means of photo-lithographic and etching techniques to accomplish an electron beam generating device. Element part 36 and electrodes 32 are laminated with this layer 33 interposed, and thus a display can be provided cheaply, which is easy to have alignment and is equipped with a large screen and highly fine picture.
NOMURA ICHIRO
MISHINA SHINYA
SUZUKI HIDETOSHI
KANEKO TETSUYA
Next Patent: ELECTRON BEAM EMITTING DEVICE AND IMAGE DISPLAY/RECORDER USING IT