Title:
電子線照射装置
Document Type and Number:
Japanese Patent JP4641844
Kind Code:
B2
Abstract:
To provide an electron beam irradiation device capable of reducing quantity of inert gas consumed while maintaining oxygen concentration in an irradiation chamber in appropriate level. An electron beam irradiation device to irradiate an electron beam to an irradiated object passing through an irradiation chamber while introducing inert gas into the irradiation chamber comprising an oxygen concentration detection device to detect oxygen concentration in the irradiation chamber; a main controlling valve to regulate flow rate of inert gas introduced in the irradiation chamber; a control unit to control valve travel of the main controlling valve so that the flow rate of the inert gas decreases when the oxygen concentration becomes low on the basis of the oxygen concentration detected by the oxygen concentration detection device.
More Like This:
Inventors:
Seitaro Nakao
Application Number:
JP2005090159A
Publication Date:
March 02, 2011
Filing Date:
March 25, 2005
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G21K5/00; B01J19/12; G21K5/04; G21K5/10
Domestic Patent References:
| JP7017365U | ||||
| JP62014399U | ||||
| JP60140641U | ||||
| JP6080200U | ||||
| JP53113777A | ||||
| JP62229089A | ||||
| JP2001108800A | ||||
| JP5060899A | ||||
| JP9292498A |
Attorney, Agent or Firm:
Koji Yamamoto
Akihiko Yamashita
Kishimoto Tatsuto
Akihiko Yamashita
Kishimoto Tatsuto