Title:
ELECTRON BEAM IRRADIATION EQUIPMENT
Document Type and Number:
Japanese Patent JP2004239819
Kind Code:
A
Abstract:
To provide an electron beam irradiation equipment of a long service life which irradiates substantially the whole face of an irradiated object with an electron beam, and widens an irradiation area of the electron beam.
In this electron beam irradiation equipment for impressing a voltage between a cathode 2 and an anode 3 to irradiate the irradiated object X1 with the electron beam B1 generated therein, the cathode 2 is formed into a prescribed shape using a carbon nano-tube.
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Inventors:
TOKUNAGA CHIEKO
YAMAMOTO AKIYOSHI
KANEKO NAMIO
NAKASHIZU TAMIRO
YAMAMOTO AKIYOSHI
KANEKO NAMIO
NAKASHIZU TAMIRO
Application Number:
JP2003030778A
Publication Date:
August 26, 2004
Filing Date:
February 07, 2003
Export Citation:
Assignee:
ISHIKAWAJIMA HARIMA HEAVY IND
International Classes:
G21K5/04; B01J19/12; H01J37/073; (IPC1-7): G21K5/04; B01J19/12
Attorney, Agent or Firm:
Nobuo Kinutani