To provide an electron emission element containing an electron emission part (emitter part) capable of emitting electrons safely and efficiently, composed by using emissive material easy to be handled, and a manufacturing method of the electron emission element.
This electron emission element is equipped at least with a cathode electrode, an electron emission part 2 arranged in contact with the cathode electrode, an extracting electrode 3 installed near the electron emission part 2, and an anode electrode arranged oppositely to the cathode electrode. The electron emission part 2 is equipped with easily-emissive material, and an insulator 6 installed so as to cover at least a part of the periphery of the easily-emissive material. This manufacturing method of the electron emission element contains a first process in which the electron emission side surface of the electron emission part 2 where the easily-emissive material is exposed is coated with a conductive thin film 8, and a second process in which a part of the conductive thin film 8, at least contacted with the easily-emissive material, is removed to form an opening part 11 by applying a prescribed voltage between the easily-emissive material and the conductive thin film 8, and hereby the conductive thin film 8 is composed into the extracting electrode 3.
DEGUCHI MASAHIRO
IMAI KANJI
SEKIGUCHI TOMOHIRO
KUROKAWA HIDEO
KOGA KEISUKE
SHIRATORI TETSUYA
KAWASE TORU
