Title:
ELECTRON EMISSION SOURCE AND ITS PRODUCTION METHOD
Document Type and Number:
Japanese Patent JP3595233
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a field emission type cold cathode electron emission source of improved uniformity in electron emission, and its production method.
SOLUTION: The electron emission source 10 is equipped with a substrate 11 with a number of through holes 13 made of a material with metal as the main component, which serves as a nucleus of formation of nanotube-shaped fiber and, a film 12 made of the nanotube-shaped fiber disposed on the surface of the substrate 11 and on a wall of penetrating hole 14. The source 10 is made of iron or alloy including iron. The producing procedure of the source 10 is as follows; Substrate 11 having a number of through holes 13 is heated and held at a certain temperature in a material gas atmosphere in which a gas composed of carbonaceous compounds is contained in a certain concentration. Nanotube-shaped fiber made of carbon is made to grow on the surface of the substrate 11 and the wall of the through hole 14 into a curled state. Then a film 12 is formed to cover the substrate 11 and the through hole 14.
Inventors:
Sashiro Uemura
Takeshi Nagamaki
Junko Yotani
Hirohiko Murakami
Takeshi Nagamaki
Junko Yotani
Hirohiko Murakami
Application Number:
JP2000037672A
Publication Date:
December 02, 2004
Filing Date:
February 16, 2000
Export Citation:
Assignee:
Noritake Company Limited
ULVAC, Inc.
ULVAC, Inc.
International Classes:
H01J1/30; C01B31/02; H01J1/304; H01J9/02; H01J29/04; H01J31/12; (IPC1-7): H01J1/304; C01B31/02; H01J9/02; H01J29/04; H01J31/12
Domestic Patent References:
| JP200057934A |
Foreign References:
| WO1999065821A1 |
Other References:
村上裕彦他,カーボンナノチューブを用いた電子源の開発,1999年(平成11年)春季第46回応用物理学関係連合講演会講演予稿集,1999年 3月28日,第2分冊,第796頁、29a-YC-6
Attorney, Agent or Firm:
Masaki Yamakawa