PURPOSE: To enhance the electron emitting characteristics along with a long lifetime and stable operation by forming an electroconductive film on an underlay thin film or a base board containing specific substance(s).
CONSTITUTION: A base board 1 contains a substance having a work function lower than the substance(s) constituting an electron emission part 2, and after washing the base board 1 with detergent, pure water, and an organic solvent, an underlay film 6 is formed by the vacuum evaporation process or sputtering process. An organic metal solution having as chief element the metal constituting a conductive film 3 is applied to the base board 1 and dried and heated as a baking process, followed by a lift-off and etching process, and thus conductive film 3 with patterning is produced. An element electrode material is deposited on this film 3, followed by a photolithographic process so that element electrodes 4, 5 are formed. Current is fed from a power supply to between the element electrodes 4, 5, and the film 3 is destroyed, deformed, or denatured locally, and thus electron emission part 2 is accomplished.
HAMAMOTO YASUHIRO
NOMURA ICHIRO
TAKEDA TOSHIHIKO
SAKANO YOSHIKAZU
