Title:
ELECTRON SOURCE
Document Type and Number:
Japanese Patent JP3896808
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent the uniformity of the distribution of the amount of electrons in the direction of the width of irradiation from degenerating due to the thermal deformation of an extraction electrode on the upstream side as well as to keep an acceleration electric field from reaching the extraction electrode on the upstream side by further improving an electron source with two-sheet electrodes.
SOLUTION: In this electron source 6a, extraction electrodes for extracting an electron beam 10 are located at intervals between them in the direction of the extraction of the electron beam 10. The electrodes are two porous ones coupled at the same potential. The electron source 6a consists of a first extraction electrode 24 on the upstream side and a second extraction electrode 26 on the downstream side. The first extraction electrode 24 has a structure where it is separated into parts in the direction Y of the width of irradiation with the electron beam 10. Each electron extraction hole 25 of the first extraction electrode 24 is made larger than each electron extraction hole 27 of the second extraction electrode 26.
Inventors:
Shuichi Taniguchi
Toshiro Nishimi
Toshiro Nishimi
Application Number:
JP2001186402A
Publication Date:
March 22, 2007
Filing Date:
June 20, 2001
Export Citation:
Assignee:
Nhv corporation
International Classes:
G21K5/04; (IPC1-7): G21K5/04
Domestic Patent References:
| JP5114366A | ||||
| JP2000171599A | ||||
| JP2000249799A | ||||
| JP9236700A | ||||
| JP8285999A | ||||
| JP5225934A | ||||
| JP7036100U | ||||
| JP2002122700A |
Attorney, Agent or Firm:
Keiji Yamamoto
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