PURPOSE: To perform easily mounting and removal of a filament and Wehnelt electrode and alingment work after mounting by forming only acceleration electrodes in steps located in the upper part in a single piece with an electron beam generating block, and providing possibility of mounting and removal on/from an external cylinder and a vacuum vessel.
CONSTITUTION: An electron beam generating block 30 is so structure that a filament 22 and a Wehnelt electrode 23 are formed in a single piece, and connection is made by a terminal member 34 to a cable 28 and a bushing 29. An electron beam accelerating block 32 is so structured that some 44 among a number of acceleration electrodes 24 situated over near the filament 22 are mounted on an electrode supporting cylinder 31, and consolidation is made in a single piece with the electron beam generating block 30 through a coupling member 33. The electrodes 44 mounted on the supporting cylinder 31 are installed inside a vacuum vessel 26 through a feeder wire 35. That is, the filament 22 and electrode 23 and the electrodes 44 in steps can in lump be mounted and removed on/from the external cylinder 25 and vessel 26, so that alignment work can be done easily, and there is no risk of misaligning at mounting and removing. The mounting and removal of the part constructed in a single piece can be done easily.
KOBAYASHI TAKASHI
ANDO KOJI
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