Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTRONIC SPECTROGRAPH
Document Type and Number:
Japanese Patent JP2002340827
Kind Code:
A
Abstract:

To provide an electronic spectrograph for mapping analysis capable of simplifying an analysis over the whole and capable of remarkably shortening the time to be required for the analysis.

This electronic spectrograph is formed of an electronic spectroscope for energy disperse of the electron emitted from a sample, several detectors for detecting intensity of the electron dispersed by the spectroscope, a means for obtaining single spectral for the element composition analysis by correcting and adding a displacement of each detected real data obtained by the several detectors and for obtaining the addition spectral by simply adding the detected real data obtained by each detector, and a means for performing the mapping analysis of the element distribution of the sample on the basis of the simple addition spectral. With this structure, a necessity of separately providing a simple addition spectral between the spectral analysis for the element composition analysis and the mapping analysis of the element distribution is eliminated to shorten the time for analysis.


Inventors:
KUDOU MASATO
Application Number:
JP2001140818A
Publication Date:
November 27, 2002
Filing Date:
May 11, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
JEOL LTD
International Classes:
G01N23/227; (IPC1-7): G01N23/227
Attorney, Agent or Firm:
Kenji Mogami