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Patent Searching and Data


Title:
ELECTROOPTICAL DEVICE AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2011158753
Kind Code:
A
Abstract:

To easily perform film thickness control of a capacitance insulating film in an electrooptical device such as a liquid crystal device.

The electrooptical device includes: transistors (30) provided for respective pixels; pixel electrodes (9) provided corresponding to the transistors; and a storage capacitance (70) electrically connected to the pixel electrodes and made of a first capacitance electrode (2), a second capacitance electrode (5) disposed opposite to the first capacitance electrode from an upper layer side and the capacitance insulating film (7) formed between the first and second capacitance electrodes. The capacitance insulating film has: a first layer (7a) containing hafnium oxide; a second layer (7b) formed in an upper layer of the first layer and containing alumina; a third layer (7c) formed in a lower layer of the first layer and containing alumina; and a fourth layer (7d) formed in an upper layer of the second layer and containing hafnium oxide.


Inventors:
KONNO TORU
Application Number:
JP2010021060A
Publication Date:
August 18, 2011
Filing Date:
February 02, 2010
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G09F9/30; G02F1/1368
Attorney, Agent or Firm:
Tatsuo Egami
Satoshi Nakamura