PURPOSE: To obtain a high-quality electrophotography which is hardly deteriorated in quality of picture due to an image and a cleaning failure by a method wherein a hydrogenated amorphous silicon photoconductive layer is laminated on a conductive support, and a metal oxide film is formed thereon.
CONSTITUTION: A hydrogenated amorphous silicon photoconductive layer 203 is laminated on a conductive support 201, sol-like high-molecule fluid dispersant composed of organic metal compound, water, alcohol, and acid is applied onto the surface of the photoconductive layer 203 and turned into gel through hydrolysis and condensation polymerization, and the gel is formed into a metal oxide film 204 by removing water, alcohol, and acid from it by heating. A structural fault which is latent in an amorphous silicon photosensitive material and caused by burrs and foreign objects on the conductive support 201 is prevented by the metal oxide film 204. The metal oxide film 204 is high in strength and made to serve as a protective layer, and moreover a surface smoothing layer 205 used for improving the metal oxide film 204 in cleaning properties can be provided onto the protective later.
EBARA TOSHIYUKI
UEDA SHIGENORI
NIINO HIROAKI
KAWADA MASAYA
