Title:
ELECTROSTATIC ACTUATOR, INK JET HEAD AND INK JET RECORDING APPARATUS
Document Type and Number:
Japanese Patent JP2002273341
Kind Code:
A
Abstract:
To solve the problem that a step for preventing adsorption between a diaphragm and an electrode side is complicated.
An oxide film 17 is formed on the surface of an electrode 15 and ion implantation is carried out in the surface of the oxide film 17 to form a carbon-enriched ion implanted film 18. The surface energy on the outermost surface is preferably 200 dyn/cm or lower, and further, the surface roughness of the outermost surface is preferably 0.2 nm or higher. The above electrostatic actuator and the above ink jet recording apparatus comprise a vibration chamber formed between a diaphragm 10 and an electrode 15 for causing deformation of the diaphragm 10 and in which an inert gas or dry air is enclosed.
Inventors:
KANEHARA SHIGERU
Application Number:
JP2001073320A
Publication Date:
September 24, 2002
Filing Date:
March 15, 2001
Export Citation:
Assignee:
RICOH KK
International Classes:
B41J2/045; B06B1/02; B41J2/055; H02N1/00; (IPC1-7): B06B1/02; B41J2/045; B41J2/055; H02N1/00
Attorney, Agent or Firm:
Inamoto Tomiho