Title:
静電チャック、基板固定装置
Document Type and Number:
Japanese Patent JP7278035
Kind Code:
B2
Abstract:
An electrostatic chuck includes a base having a support surface configured to retain a retaining target by electrostatic retention, and a thermocouple configured to detect a temperature of the base. The thermocouple includes first and second metal parts provided inside the base and having ends connected to each other to form a measuring junction, a first wire part having one end connected to the other end of the first metal part inside the base, and another end extending outside the base, and a second wire part having one end connected to the other end of the second metal part inside the base, and another end extending outside the base. The first metal part and the first wire part are formed from a first material, and the second metal part and the second wire part are formed from a second material different from the first material.
Inventors:
Tomotake Minemura
Application Number:
JP2018117331A
Publication Date:
May 19, 2023
Filing Date:
June 20, 2018
Export Citation:
Assignee:
Shinko Electric Industry Co., Ltd.
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP201269947A | ||||
| JP2000286331A | ||||
| JP200225913A | ||||
| JP2006196864A | ||||
| JP201860833A |
Foreign References:
| US20170032935 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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