To provide an electrothermal nanowire that is manufactured by growing a single-crystal electrothermal nanowire from an electrothermal material using a compressive stress caused by a difference in a thermal expansion coefficient after laminating an oxide layer and an electrothermal material having different thermal expansion coefficients from each other on a substrate, and to provide a method of manufacturing the same.
A method of manufacturing an electrothermal nanowire includes a step of preparing a substrate with an oxide layer formed on an upper surface thereof, a step of forming a number of nanoparticles composed of Al, Ag, Fe, or an oxide thereof on the oxide layer, a step of forming an electrothermal material thin film having an electrothermal property on the oxide layer so that a number of nanoparticles may be contained on the oxide layer, a step of performing heat treatment of the substrate on which the electrothermal material thin film is formed to grow the electrothermal nanowire containing a number of nanoparticles, and a step of cooling the substrate at a room temperature after the heat treatment process.
COPYRIGHT: (C)2010,JPO&INPIT
HAM JIN HEE
LEE SEUNG HYUN
ROH JONG WOOK
KIM HYUN SU
KIM WOO CHUL
| JP2009517331A | 2009-04-30 | |||
| JP2006196727A | 2006-07-27 | |||
| JP2008305913A | 2008-12-18 |
Yasuo Yanagibashi
Yoshinori Ikukawa
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