Title:
汚染の影響を受けやすい平坦な物品を保管する、特に、半導体ウェハを保管する装置
Document Type and Number:
Japanese Patent JP5001946
Kind Code:
B2
Abstract:
An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed mounting rack. The compartments are open on a front side and are arranged in rows and columns side by side and one above the other on the fixed mounting rack. The compartments each have a plurality of slotted holders for receiving the flat articles, and they surround a first handling unit configured for automatically inserting and removing the flat articles into and out of the slotted holders. A closed housing forms a clean room where both the plurality of compartments and the first handling unit are arranged.
Inventors:
Leapstock, lutz
Michael Mysner
Michael Mysner
Application Number:
JP2008534888A
Publication Date:
August 15, 2012
Filing Date:
September 26, 2006
Export Citation:
Assignee:
Dynamic Micro Systems Semiconductor Equipment GmbH
International Classes:
H01L21/673; B65G1/00; B65G1/04
Domestic Patent References:
| JP11307610A | ||||
| JP11329989A | ||||
| JP10022359A | ||||
| JP2000308988A | ||||
| JP7106406A |
Foreign References:
| US4886412 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Hiroyuki Okamoto
Kawazu Koichi
Mio Kawasaki
Hiroyuki Okamoto
Kawazu Koichi