Title:
ESCAPE ELECTRON DISCHARGE JUDGING DEVICE
Document Type and Number:
Japanese Patent JPS5948683
Kind Code:
A
Inventors:
OOTSUKA MICHIO
Application Number:
JP15816482A
Publication Date:
March 19, 1984
Filing Date:
September 13, 1982
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H05H1/00; G21B1/00; G21B1/05; H05H1/12; (IPC1-7): G21B1/00; H05H1/12
Attorney, Agent or Firm:
Akio Takahashi