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Title:
ESTIMATION METHOD OF TEST EQUIPMENT
Document Type and Number:
Japanese Patent JPH0541419
Kind Code:
A
Abstract:

PURPOSE: To obtain the estimation method of a test equipment which method can define whether disconnection or imperfect wiring exists in a measuring route.

CONSTITUTION: Tips of the whole probes 3 are connected with a conductive region 11 where the whole probes 3 can be shorted on the same surface, and shorted. Thereby a return route of current which returns from a tester 1 to the tester 1 through one probe out of a plurality of the probes 3 is formed. By operating the tester 1, one of the probes 3 is grounded via a wiring 2 connecting the tester 1 with the probe 3, and currents are applied to all of the other probes 3 from a current source in the tester 1. By measuring voltages generated in all current sources in the tester 1 which apply the currents, the route where disconnection or imperfect wiring exists can be defined.


Inventors:
NOZAKI KIYOTAKA
DAIMON HISAO
Application Number:
JP19517891A
Publication Date:
February 19, 1993
Filing Date:
August 05, 1991
Export Citation:
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Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
G01R31/08; G01R31/26; H01L21/66; G01R1/06; (IPC1-7): G01R1/06; G01R31/08; G01R31/26; H01L21/66
Attorney, Agent or Firm:
Akira Kobiji (2 outside)



 
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