Title:
ETCHING DEVICE
Document Type and Number:
Japanese Patent JPS5456371
Kind Code:
A
Abstract:
PURPOSE:To perform correct etching and increase processing capacity by providing warning lamps cooperating with timers, etc. to each wafer holding base of etching channels. CONSTITUTION:An etching channel 4 for flowing etching solution and a plurality of a pair of channels for washing channels 5 are provided to the inclined channel 3 of a machine base 15 and a holding base 8 for holding wafers 7 is disposed to each chamel. The display lamp 22 provivded on the left side of each holding base 8 of the channel 4 is connected to the corresponding one set of the start switch 17 and reset switch 18 including timer of the operation panel 16 on the machine base 15. When a pattern appears in the wafer 7, the operator depresses the switch 17 corresponding to that hodling base 8, then the corresponding lamp 22 flickers in a blue color, announcing additional etching. When the intended time having been preset from inspection, the timer changes the lamp 22 to red color lighting, warning the end. The operator performs shifting of this wafer 7 to the washing channel 5, resetting (putting out of the lamp 22), etc. of the switch 17 by the switch 18, and replenishes the unprocessed wafer.
Inventors:
SASAKI TAMOTSU
Application Number:
JP12238977A
Publication Date:
May 07, 1979
Filing Date:
October 14, 1977
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/306; H01L21/302; (IPC1-7): H01L21/302
Domestic Patent References:
| JPS493575A | 1974-01-12 |