Title:
ETCHING LIQUID
Document Type and Number:
Japanese Patent JP2009191357
Kind Code:
A
Abstract:
To provide an etching liquid for micro-etching a copper surface which can securely maintain adhesion between a copper layer and an insulating layer even under high temperature conditions, and further can improve adhesion to wide insulating materials.
Disclosed is an etching liquid for copper comprising: sulfuric acid of 60 to 220 g/L; hydrogen peroxide of 5 to 70 g/L; and water, and comprising: phenyl tetrazoles of 0.01 to 0.7 g/L; and nitro benzotriazoles of 0.01 to 1.5 g/L, and further comprising: benzenesulfonic acids; and chloride ions.
Inventors:
NAKAMURA SACHIKO
NAKAJIMA KEIICHI
NAKAJIMA KEIICHI
Application Number:
JP2008267719A
Publication Date:
August 27, 2009
Filing Date:
October 16, 2008
Export Citation:
Assignee:
MEC KK
International Classes:
C23F1/18
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office
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