Title:
EVALUATING ELEMENT FOR COUPLING EFFICIENCY BETWEEN WAVEGUIDES
Document Type and Number:
Japanese Patent JPH0548075
Kind Code:
A
Abstract:
PURPOSE: To provide an element for evaluation of coupling efficiency between waveguides, which can measure the coupling efficiency between the weveguides of a waveguide type of optical integrated element easily, and its manufacturing method.
CONSTITUTION: This is an element for evaluation for the coupling efficiency between waveguides where elements in which the whole region is an active waveguide layer region 2 (length of the region; L1+L2+L3) and elements in which one part of region is an active waveguide layer region 2 (length of the region;L1) and the remainder is an inactive waveguide layer region 3 (length of the region; L2+L3) are arranged alternately.
Inventors:
ISHII HIROYUKI
TOMORI YUICHI
YOSHIDA JUNICHI
TOMORI YUICHI
YOSHIDA JUNICHI
Application Number:
JP23243091A
Publication Date:
February 26, 1993
Filing Date:
August 21, 1991
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G01J1/00; G01M11/02; G02B6/12; G02B6/122; G02B6/26; H01L27/15; H01L33/14; H01L33/30; (IPC1-7): G01J1/00; G01M11/02; G02B6/12; G02B6/26; H01L27/15; H01L33/00
Attorney, Agent or Firm:
Akihide Sugimura (1 outside)
Next Patent: TUNNELLING EFFECT ELEMENT