Title:
EVALUATION DEVICE AND EVALUATION METHOD OF SEMICONDUCTOR LIGHT-EMITTING ELEMENT
Document Type and Number:
Japanese Patent JP2016184607
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an evaluation device of a semiconductor light-emitting element capable of evaluating the optical characteristics with high accuracy, regardless of the wavelength region of the light emitted from the semiconductor light-emitting element.SOLUTION: An evaluation device of a semiconductor light-emitting element includes: a stage 6 having a wafer suction part 3 formed in the center of the wafer stacking surface, an air outlet 7 formed in the side face, and a vacuum groove 5 connecting the wafer suction part 3 and the air outlet 7 spatially; a probe 4 capable of applying a power to a semiconductor light-emitting element on a semiconductor wafer 10 to be stacked on the wafer stacking surface of the stage 6; and a light-receiving part 2 disposed on the side opposite to the wafer stacking surface, and receiving the light outputted from the semiconductor light-emitting element. The vacuum groove 5 extends in the first axial direction, i.e., any one axial direction of the stage 6 in the plane direction, and when the probe 4 applies a power to the semiconductor light-emitting element, moves the semiconductor wafer 10 and the light-receiving part 2 in the second axial direction perpendicular to the first axial direction and parallel with the plane of the stage 6.SELECTED DRAWING: Figure 3
Inventors:
TAKEDA KOMEI
Application Number:
JP2015063038A
Publication Date:
October 20, 2016
Filing Date:
March 25, 2015
Export Citation:
Assignee:
ASAHI KASEI CORP
International Classes:
H01L21/66; G01R31/26
Attorney, Agent or Firm:
Patent Business Corporation Tani/Abe Patent Office