Title:
蒸着源、蒸着装置
Document Type and Number:
Japanese Patent JP7113964
Kind Code:
B2
Abstract:
The invention provides an evaporator that is heated by an electron beam in vacuum, evaporates or sublimates a vapor-deposition material, and forms a lithium-containing compound coating on a surface of a substrate in transfer by codeposition. The evaporator includes a hearth liner that includes a cooler; and a plurality of liners that are accommodated in the hearth liner, each of which has the vapor-deposition material thereinside.
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Inventors:
Gaku Gibo
Ehira Dai
Jun Sakamoto
Ehira Dai
Jun Sakamoto
Application Number:
JP2021512596A
Publication Date:
August 05, 2022
Filing Date:
December 22, 2020
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/24
Domestic Patent References:
| JP2006070309A | ||||
| JP2012233211A | ||||
| JP2008057000A | ||||
| JP3229862A |
Foreign References:
| WO2009047879A1 | ||||
| WO2013001827A1 |
Attorney, Agent or Firm:
Shu Oikawa
Tomomasa Katsumata
Tomomasa Katsumata
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