Title:
EVICE FOR FORMING THIN FILM
Document Type and Number:
Japanese Patent JPH05179443
Kind Code:
A
Abstract:
PURPOSE: To measure the optical characteristics of a thin film during film formation.
CONSTITUTION: A substrate 21 and the body 131 of a target 13 are placed opposite to each other in a chamber 11 kept vacuum. An optical path is formed at the central part of the target 13 and light for measurement is made incident on the surface of a thin film 22 formed on the substrate 21 through the optical path. The optical characteristics of the thin film 22 are measured by measuring the quantity of light passing through the substrate 21 and that of light reflected by the substrate 21.
Inventors:
SANO HISAYOSHI
Application Number:
JP34685391A
Publication Date:
July 20, 1993
Filing Date:
December 27, 1991
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
C23C14/35; C23C14/54; (IPC1-7): C23C14/35; C23C14/54
Attorney, Agent or Firm:
Fuyuki Nagai