To provide a flat type excimer lamp and an excimer irradiation device capable of efficiently irradiating excimer light.
This excimer lamp 1 is provided with a discharge vessel 2 in a thin box shape, a discharging filler gas 5 filled in the discharge vessel 2, and two electrodes 4, 6 disposed face to face on the outside of the discharge vessel so as to hold the discharge vessel 2 between them, and when a high frequency voltage is impressed between them, excimer light is irradiated to the outside by permeating an excimer irradiating surface which is either one of the two electrodes. Thereby, if a body to be irradiated is placed apart from the excimer irradiating surface by a fixed distance, excimer light with sufficient strength can be efficiently irradiated to the body to be irradiated. In addition, since the excimer light is irradiated from the excimer irradiating surface, all of the irradiated excimer light can be irradiated to the body to be irradiated, and irradiation efficiency is enhanced.
WATANABE M & CO LTD