Title:
露光装置
Document Type and Number:
Japanese Patent JP4514317
Kind Code:
B2
Inventors:
Tomotaka Takahashi
Application Number:
JP2000359394A
Publication Date:
July 28, 2010
Filing Date:
November 27, 2000
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B9/025; G03F7/20; G03F7/22; H01L21/027
Domestic Patent References:
| JP54037472A | ||||
| JP60158449A | ||||
| JP61156003A | ||||
| JP61294480A | ||||
| JP2196202A | ||||
| JP3135568A | ||||
| JP6333801A | ||||
| JP7013476A | ||||
| JP7029811A | ||||
| JP7159609A | ||||
| JP9153446A | ||||
| JP11026344A | ||||
| JP2000507003A |
Attorney, Agent or Firm:
Masaru Itami