Title:
Exposure device
Document Type and Number:
Japanese Patent JP5915698
Kind Code:
B2
Inventors:
Takeshi Minobe
Takeshi Nakatani
Takeshi Nakatani
Application Number:
JP2014121622A
Publication Date:
May 11, 2016
Filing Date:
June 12, 2014
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G03F7/20; H01L21/677
Domestic Patent References:
| JP2006267802A | ||||
| JP11233408A | ||||
| JP6348024A | ||||
| JP2011233776A | ||||
| JP2013050504A |
Attorney, Agent or Firm:
Megumi Konishi
Shigeyuki Nagaoka
Shigeyuki Nagaoka