Title:
FABRICATION OF PIEZOELECTRIC THIN FILM ELEMENT, INK JET RECORDING HEAD EMPLOYING IT, AND INK JET PRINTER EMPLOYING THE RECORDING HEAD
Document Type and Number:
Japanese Patent JP3682684
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To ensure good piezoelectric strain characteristics by forming a precursor thin film layer of piezoelectric on a lower electrode and then crystallizing the precursor thin film layer by immersing it into heated solution at the time of fabricating a piezoelectric thin film element by forming a lower electrode layer, a piezoelectric thin film layer, and an upper electrode layer sequentially on a substrate.
SOLUTION: At the time of fabricating a piezoelectric thin film element, a single crystal silicon substrate 10 having face orientation (110) is subjected to wet thermal oxidation thus depositing silicon oxide 12 on the opposite sides of the substrate 10. Titanium is deposited thereon by sputtering and a lower electrode 14 of platinum is formed thereon followed by formation of a piezoelectric thin film, i.e., a PZT film. More specifically, a pattern of metal mask 16, nickel mask is formed after forming a precursor layer 15 of PZT film and the substrate is immersed into aqueous solution of nitric acid thus crystallizing the precursor thin film. Subsequently, the PZT layer 15B is removed from noncrystallized region and that part 15 filled with photoresist 18 before art upper electrode layer 20 is formed thereon.
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Inventors:
Hiroyuki Kamei
Makoto Matsuzaki
Nishiwaki Manabu
Katsuto Shimada
Akira Matsuzawa
Makoto Matsuzaki
Nishiwaki Manabu
Katsuto Shimada
Akira Matsuzawa
Application Number:
JP28289798A
Publication Date:
August 10, 2005
Filing Date:
October 05, 1998
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/16; H01L41/09; H01L41/22; H01L41/317; (IPC1-7): H01L41/09; B41J2/045; B41J2/055; B41J2/16; H01L41/22
Domestic Patent References:
| JP8306980A | ||||
| JP9223831A |
Foreign References:
| EP0794579A1 | ||||
| WO1997003834A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Katsuro Tanaka
Shinji Oga
Katsuro Tanaka
Shinji Oga