PURPOSE: To ensure the flexibility of a terminal, by applying a step-and-repeat system when a facsimile transmitting memeory is formed by means of a mask and therefore arraying memory devices which record picture element signals with the sizes suited to the facsimile original.

CONSTITUTION: The electrons radiated from an electron gun 1 are turned into parallel beams through a condenser lens system 2 and then irradiated to a mask 3. These beams are turned on and off by an electrostatic blanking plate 4. The electrons passed through a window of the mask 3 are applied to projection lenses 5 and 6 to form an image on a wafer 7. In this case, the positioning, diaphragm, etc. are controlled by a coil 8, and an XY stage 9 holding the wafer 7 is shifted in steps after the 1st exposure to receive an exposure over the entire surface of the stage 9. Then a new wafer is put on the wafer 7 to receive a process in the same way. A step-and-repeat system is apllied to array memory devices which record picture element signals with the sizes suited to the facsimile original.