Title:
強誘電体膜形成用溶液および強誘電体膜の形成法
Document Type and Number:
Japanese Patent JP4146533
Kind Code:
B2
Abstract:
Acetylacetone and an aqueous nitric acid are included in a solution in which organic metal compounds of metals constituting a ferroelectric in an organic solvent thereby forming a ferroelectric film formation solution. The solution is applied to a substrate, followed by drying and baking to obtain a ferroelectric film. As a consequence, even when forming a ferroelectric film such as a PZT or PLZT film containing a II group element in the periodic table, a stable ferroelectric film formation solution which prevents neither crystallization nor gelation and is reduced in a change with time in the viscosity thereof can be obtained. A ferroelectric film which contains a II group element and has excellent ferroelectric properties can be thus produced with ease.
Inventors:
Kamizawa
Katsuragi Hayato
Yamate Taku
Kiyoto Mori
Katsuragi Hayato
Yamate Taku
Kiyoto Mori
Application Number:
JP22470197A
Publication Date:
September 10, 2008
Filing Date:
August 21, 1997
Export Citation:
Assignee:
ROHM Co., Ltd.
Kanto Chemical Co., Ltd.
Kanto Chemical Co., Ltd.
International Classes:
C01B13/14; C01G25/02; C04B35/49; C23C18/12; H01B3/12; H01L21/316; H01L21/314
Domestic Patent References:
| JP7037422A | ||||
| JP1260870A | ||||
| JP10259095A | ||||
| JP8081282A | ||||
| JP2022105A | ||||
| JP6166501A | ||||
| JP59213602A |
Attorney, Agent or Firm:
Kawamura Taku