Title:
ファイバーレーザー装置及びワークピースを処理するための方法
Document Type and Number:
Japanese Patent JP7274455
Kind Code:
B2
Abstract:
A surface treating method and apparatus include operating a quasi-continuous wave fiber laser and pre-scan shaping the laser beam such that an instantaneous spot beam has predetermined geometrical dimensions, intensity profile, and power; operating a scanner at an optimal angular velocity and angular range to divide the pre-scan beam into a plurality of sub-beams deflected towards the surface being processed; guiding the sub-beams through a post-scan optical assembly to provide the spot beam with predetermined geometrical dimensions, power, and angular velocity and range, which are selected such that the instantaneous spot beam is dragged in a scan direction over a desired length at a desired scan velocity, which allow the treated surface to be exposed for a predetermined exposure duration and have a predetermined fluence distribution providing the treated surface with a quality comparable to that of the surface processed by an excimer laser or a burst-mode fiber laser.
Inventors:
Alexander Limanov
Michael von dadelzen
James Codingley
Joshua Shorenley
Michael von dadelzen
James Codingley
Joshua Shorenley
Application Number:
JP2020505151A
Publication Date:
May 16, 2023
Filing Date:
July 31, 2018
Export Citation:
Assignee:
IP G Photonics Corporation
International Classes:
H01L21/268; B23K26/064; B23K26/073; B23K26/352; H01L21/20
Domestic Patent References:
| JP2005333117A | ||||
| JP2006134986A |
Foreign References:
| US20160013057 | ||||
| WO2017120584A1 | ||||
| WO2017004280A1 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mihiro
Tatsuhiko Abe
Shinya Mihiro
Tatsuhiko Abe