Title:
FILTER UNIT FOR CLEAN ROOM
Document Type and Number:
Japanese Patent JP3470919
Kind Code:
B2
Abstract:
PURPOSE: To provide a good air current distribution by forming an air filter for a clean room into a shape whose cross section is almost a semiellipse cut in its minor axis direction.
CONSTITUTION: In an air filter unit 50 for a clean room, an air filter 51 is formed into a shape whose cross section is almost a semiellipse cut in its minor axis direction. The air filter unit 50 constituted of the air filter 51 and a supplier chamber 52 is fitted on a ceiling 61 of a clean room 60. At this time, the curvature of a filter surface 51a in a region 51A for blowing out in the minor axis direction of the air filter 51 is made smaller than that of a conventional air filter. That is, by increasing minus Z components in the vector direction of fluid elements 70 arranged in the minus Z direction from a semicircular section little by little, the fluid elements 70 being in charge of an expanse of a space in the X direction is increased. In this way, the expanse of the fluid elements 70 to a space in the X direction is decreased, wind velocity is kept rather far from a blow-out hole to restrain the generation of negative pressure.
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Inventors:
Seijiro Yoshizaki
Akira Kato
Akira Kato
Application Number:
JP29530094A
Publication Date:
November 25, 2003
Filing Date:
November 29, 1994
Export Citation:
Assignee:
Sanki Industry Co., Ltd.
International Classes:
F24F7/06; B01D46/52; F24F13/068; F24F13/08; (IPC1-7): F24F13/08; F24F7/06; F24F13/068
Domestic Patent References:
| JP126462A | ||||
| JP2111411A | ||||
| JP5225462U | ||||
| JP4106621U | ||||
| JP587442U | ||||
| JP61110025U | ||||
| JP6332621U | ||||
| JP6335415U | ||||
| JP63181416U | ||||
| JP252031U |
Attorney, Agent or Firm:
Furuya Fumio (1 person outside)