PURPOSE: To obtain a fixed magnetic disk capable of high-density recording by using a plasma CVD system to form a specially-structured Ni oxide film with a priority orientation toward a specified crystal surface on a disk substrate and by forming a specifically-structured iron oxide film.
CONSTITUTION: A disk substrate 4 is placed inside a reaction chamber 1. This disk substrate 4 is then heated by a heater 17 and rotated while the based gases are fed and high-frequency voltage is applied between the electrodes 2 to generate a plasma. In this manner, an Ni oxide film with an NaCl crystal structure with a priority orientation is formed on the (100) surface of the substrate 4. Next, on top of this, an iron oxide film with a with a spinel-type crystal structure that contains cobalt with a pillar structure. As a result, vertical magnetic recording is possible and a fixed magnetic disk with high-reliability, high-density recording is achieved.
TORII HIDEO
AOKI MASAKI
HATTORI MASUZO
